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D. Ruiz, A. Donoso, J. Bellido, M. Kucera, U. Schmid, J.L. Sànchez-Rojas:
"Optimal Design of Piezoelectric Microtransducers for Static Response";
Talk: Smart Sensors, Actuators and MEMS VII 2015, Barcelona, Spain; 05-04-2015 - 05-06-2015; in: "Proc. of SPIE Vol. 9517-9520", SPIE, 9517 (2015), ISSN: 0277-786x; Paper ID 95171Y, 10 pages.

In this work, we present a systematic procedure to design piezoelectric transducers by simultaneously optimizing
the host structure and the electrode layout. The technique allows maximizing any electromechanical coupling of
output eficiency of the transducer. Either the output current collected at the electrodes when a mechanical force
is applied (sensors), or the in-plane displacement when a given voltage is applied to the electrodes (actuators)
can be optimized. We introduce a new idea to avoid the typical problem in topology optimization of the
appearance of gray areas, getting finally 0-1 designs, some of which have been manufactured. Also, mathematical
demonstration of reciprocity of the piezoelectric effect is shown. Many MEMS-based actuators like microgrippers,
surface probes, or micro-optical devices can be optimized following this procedure. A similar approach
has been demonstrated previously in modal sensors/actuators, although restricted to the design of the electrode
layout for a given structure. The novel method shown here allows the simultaneous optimization of both shapes,
for electrode and structure in the static case.

In this work, we present a systematic procedure to design piezoelectric transducers by simultaneously optimizing
the host structure and the electrode layout. The technique allows maximizing any electromechanical coupling of
output eficiency of the transducer. Either the output current collected at the electrodes when a mechanical force
is applied (sensors), or the in-plane displacement when a given voltage is applied to the electrodes (actuators)
can be optimized. We introduce a new idea to avoid the typical problem in topology optimization of the
appearance of gray areas, getting finally 0-1 designs, some of which have been manufactured. Also, mathematical
demonstration of reciprocity of the piezoelectric effect is shown. Many MEMS-based actuators like microgrippers,
surface probes, or micro-optical devices can be optimized following this procedure. A similar approach
has been demonstrated previously in modal sensors/actuators, although restricted to the design of the electrode
layout for a given structure. The novel method shown here allows the simultaneous optimization of both shapes,
for electrode and structure in the static case.

Topology optimization, Piezoelectric sensor, Simultaneous design, Electrode profile, Microtransducers, Facturability.

http://dx.doi.org/10.1117/12.2180573