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J. Reitterer, F. Fidler, G. Schmid, C. Hambeck, F. Saint Julien-Wallsee, W. Leeb, U. Schmid:
"Input-shaped actuation of electromagnetic MEMS mirrors";
Vortrag: Smart Sensors, Actuators and MEMS VII - 2015, Barcelona, Spain; 04.05.2015 - 06.05.2015; in: "Proc. of SPIE Vol. 9517-9520", SPIE, 9517 (2015), ISSN: 0277-786x; Paper-Nr. 95170J, 7 S.

For many applications of MEMS actuators a well-defined trajectory of the movable device component is crucial when
using a simple and inexpensive open-loop controller. We have applied to quasi-statically actuated electromagnetic
MEMS mirrors the control technique called "input shaping", which is widely used for systems at the macro-scale and to
a lesser extent also to systems at the micro-scale. We derive the impulse response of a filter which suppresses the
excitation of undesired resonant modes and present simulation and measurement results of the oscillation-free linear
MEMS mirror movement. The robustness of different input shaping filter types with respect to errors in the estimation of
the system parameters, i.e., resonance frequency and damping ratio, is analyzed.

For many applications of MEMS actuators a well-defined trajectory of the movable device component is crucial when
using a simple and inexpensive open-loop controller. We have applied to quasi-statically actuated electromagnetic
MEMS mirrors the control technique called "input shaping", which is widely used for systems at the macro-scale and to
a lesser extent also to systems at the micro-scale. We derive the impulse response of a filter which suppresses the
excitation of undesired resonant modes and present simulation and measurement results of the oscillation-free linear
MEMS mirror movement. The robustness of different input shaping filter types with respect to errors in the estimation of
the system parameters, i.e., resonance frequency and damping ratio, is analyzed.

Input shaping, electromagnetic MEMS mirror, open-loop control, oscillation suppression

http://dx.doi.org/10.1117/12.2181241