Talks and Poster Presentations (with Proceedings-Entry):
G. Pfusterschmied, M. Kucera, V Ruiz-Díez, A. Bittner, J.L. Sànchez-Rojas, U. Schmid:
"Multi Roof Tile-Shaped Vibration Modes In Mems Cantilever Sensors For Liquid Monitoring Purposes";
Talk: 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - MEMS 2015,
Estoril, Portugal;
01-18-2015
- 01-22-2015; in: "MEMS 2015",
IEEE,
(2015),
ISBN: 978-1479979554;
718
- 721.
English abstract:
We realized piezoelectrically self-actuated selfsensing
cantilever sensors for liquid monitoring purposes
excited in higher orders of the roof tile-shaped mode. This
advanced class of vibration mode supports very high Qfactors
in liquid media and high volume strain values
which result in combination with an optimized electrode
design in enhanced strain related conductance peaks.
Therefore, precise fluid property measurements even for
highly viscous liquids like D500 (~ 430 cP) are feasible.
German abstract:
We realized piezoelectrically self-actuated selfsensing
cantilever sensors for liquid monitoring purposes
excited in higher orders of the roof tile-shaped mode. This
advanced class of vibration mode supports very high Qfactors
in liquid media and high volume strain values
which result in combination with an optimized electrode
design in enhanced strain related conductance peaks.
Therefore, precise fluid property measurements even for
highly viscous liquids like D500 (~ 430 cP) are feasible.
Created from the Publication Database of the Vienna University of Technology.