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U. Schmid, T. Frischmuth, P. Irsigler, Th. Grille, D. Maurer, U. Hedenig, M. Kahn, G. Denifl:
"Micro Mechanical Structure And Method For Fabricating The Same";
Patent: USA, Nr. US 9,212,045 Bl; eingereicht: 31.07.2014, erteilt: 15.12.2015.

A micro mechanical structure includes a substrate and a functional
structure arranged at the substrate. The functional
structure includes a functional region which is deflectable
withrespect to the substrate responsive to a force acting on the
functional region. The functional structure further includes a
conductive base layer having a conductive base layer material.
The conductive base layer material includes sectionally
in a stiffening section a carbon material such that a carbon
concentration of the carbon material in the conductive base
layer material is at least 1014 percubic cm and at least higher
by a factor of 103 than in the conductive base layer material
adjacent to the stiffening section.

A micro mechanical structure includes a substrate and a functional
structure arranged at the substrate. The functional
structure includes a functional region which is deflectable
withrespect to the substrate responsive to a force acting on the
functional region. The functional structure further includes a
conductive base layer having a conductive base layer material.
The conductive base layer material includes sectionally
in a stiffening section a carbon material such that a carbon
concentration of the carbon material in the conductive base
layer material is at least 1014 percubic cm and at least higher
by a factor of 103 than in the conductive base layer material
adjacent to the stiffening section.