Zeitschriftenartikel:
H. W. Yoo, S. Ito, G. Schitter:
"High Speed Laser Scanning Microscopy by Iterative Learning Control of a Galvanometer Scanner";
Control Engineering Practice,
50
(2016),
S. 12
- 21.
Kurzfassung englisch:
Iterativelearningcontrol(ILC)foragalvanometerscannerisproposedtoachievehighspeed,linear,and
accuratebidirectionalscanningforscanninglasermicroscopy.Agalvanometerscanner,asalowstiffness
actuator,is first stabilizedwithafeedbackcontrolcompensatingfordisturbancesandnonlinearitiesat
low frequencies,andILCisappliedforthecontrolofthefastscanningmotion.Forstableinversionofthe
non-minimum phasezeros,atimedelayapproximationandazerophaseapproximationareusedfor
design ofILC,andtheirattainablebandwidthsareanalyzed.Experimentalresultsverifythebenefits of
ILC ofitswidecontrolbandwidth,enablingafaster,morelinear,andmoreaccuratescanningwithouta
phase lagandagainmismatch.Atthescanrateof4112linespersecond,therootmeansquare(RMS)
error oftheILCcanbereducedbyafactorof73incomparisonwiththefeedbackcontrolledgalvan-
ometer scannerofthecommercialsystem.
Schlagworte:
Iterative learning control, galvanometer scanner, non-minimum phase zeros, scanning laser microscopy, precision motion control
Erstellt aus der Publikationsdatenbank der Technischen Universität Wien.