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Zeitschriftenartikel:

H. W. Yoo, S. Ito, G. Schitter:
"High Speed Laser Scanning Microscopy by Iterative Learning Control of a Galvanometer Scanner";
Control Engineering Practice, 50 (2016), S. 12 - 21.



Kurzfassung englisch:
Iterativelearningcontrol(ILC)foragalvanometerscannerisproposedtoachievehighspeed,linear,and
accuratebidirectionalscanningforscanninglasermicroscopy.Agalvanometerscanner,asalowstiffness
actuator,is first stabilizedwithafeedbackcontrolcompensatingfordisturbancesandnonlinearitiesat
low frequencies,andILCisappliedforthecontrolofthefastscanningmotion.Forstableinversionofthe
non-minimum phasezeros,atimedelayapproximationandazerophaseapproximationareusedfor
design ofILC,andtheirattainablebandwidthsareanalyzed.Experimentalresultsverifythebenefits of
ILC ofitswidecontrolbandwidth,enablingafaster,morelinear,andmoreaccuratescanningwithouta
phase lagandagainmismatch.Atthescanrateof4112linespersecond,therootmeansquare(RMS)
error oftheILCcanbereducedbyafactorof73incomparisonwiththefeedbackcontrolledgalvan-
ometer scannerofthecommercialsystem.

Schlagworte:
Iterative learning control, galvanometer scanner, non-minimum phase zeros, scanning laser microscopy, precision motion control

Erstellt aus der Publikationsdatenbank der Technischen Universitšt Wien.