[Back]

E. Csencsics, M. Thier, P. Siegl, G. Schitter:
"Mechatronic Design of an Active Two-body Vibration Isolation System";
Talk: 7th IFAC Symposium on Mechatronic Systems & 15th Mechatronics Forum International Conference, Loughborough (Vereinigte Königreich); 09-05-2016 - 09-08-2016; in: "Proceedings of the 7th IFAC Symposium on Mechatronic Systems", IFAC-PapersOnLine/Elsevier, 49/21 (2016), ISSN: 2405-8963; 133 - 140.

Structural modes as for example decoupling of a mechanical subsystem are in general unwanted
effects in high precision positioning systems. This paper proposes a well designed decoupling
mechanism as a design choice to improve the energy efficiency of an active vibration isolation
system that needs to position a structure comprising a high and low precision subsystem.
Experimental setups of a single DoF system with a rigid and a decoupling mechanical system
structure are developed and analyzed. PD and a PID controllers are designed for the rigid and
the equivalent decoupling structure, respectively, resulting in the same disturbance rejection
performance for the high precision subsystem. Experiments demonstrate that disturbances of
12.4 μm rms amplitude are reduced to below 118 nm rms for both systems and that the rms
energy consumption of the decoupling structure can be reduced by 68% as compared to the
rigid system structure.

Vibration isolation, Systems design, Mechanical decoupling, PID controllers, Reduced energy consumption

https://publik.tuwien.ac.at/files/publik_251120.pdf