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M. Thier, R. Saathof, A. Sinn, R. Hainisch, G. Schitter:
"Six Degree of Freedom Vibration Isolation Platform for In-Line Nano-Metrology";
Vortrag: 7th IFAC Symposium on Mechatronic Systems & 15th Mechatronics Forum International Conference, Loughborough (Vereinigte Königreich); 05.09.2016 - 08.09.2016; in: "Proceedings of the 7th IFAC Symposium on Mechatronic Systems", (2016), S. 149 - 156.

A six degree of freedom, magnetically levitated metrology platform is proposed
and implemented to enable nano-scale measurements directly in a production environment by
providing vibration isolation. The metrology platform maintains a constant distance between
sample and nano-metrology tool, forming a nano-scale laboratory environment directly in the
production line. This paper presents the design of the proposed metrology platform. Tracking
of the sample is achieved by using six position sensors, a six degree of freedom actuator and
feedback control. Experimental results demonstrate positioning of the platform in six degrees
of freedom at a bandwidth of 35 Hz in the translational directions and at a bandwidth of
more than 15 Hz in the rotational directions, respectively. This results in a tracking error that
is smaller than 50 nm rms. This paper denotes the first successful attempt for six degree of
freedom vibration isolation to enable in-line nano-metrology.

Vibration isolation, Systems design, Nano-metrology, Precision positioning systems.