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S. Unger, S. Ito, D. Kohl, G. Schitter:
"Development of a Compact Atomic Force Microscope Based on an Optical Pickup Head";
Vortrag: 7th IFAC Symposium on Mechatronic Systems & 15th Mechatronics Forum International Conference, Loughborough (Vereinigte Königreich); 05.09.2016 - 08.09.2016; in: "Proceedings of the 7th IFAC Symposium on Mechatronic Systems", (2016), S. 629 - 635.

To develop a compact and cost-effective atomic force microscope (AFM), this paper
proposes to utilize components of an optical pickup head of a CD/DVD player. One of the
voice coil motors and the astigmatic detection system of the optical pickup head are employed
to provide vertical actuation of an AFM cantilever and to measure its deflection. A flexure
is installed on the optical pickup head to reduce the influence of ground vibrations and to
change its actuator sensitivity for better AFM imaging. The feasibility of the proposed system
is experimentally shown by recording a topography image of a standard calibration grating.

atomic force microscopy, optical pickup head, precision measurements, flexure based nanopositioning, voice coil motor