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B. Buchegger, J. Kreutzer, B. Plochberger, R. Wollhofen, D. Sivun, J. Jacak, G. Schütz, U. Schubert, T. Klar:
"Stimulated Emission Depletion Lithography with Mercapto-Functional Polymers";
ACS Nano, 10 (2016), 1954 - 1959.

Surface reactive nanostructures were fabricated
using stimulated emission depletion (STED) lithography.
The functionalization of the nanostructures was
realized by copolymerization of a bifunctional metal oxo
cluster in the presence of a triacrylate monomer. Ligands of
the cluster surface cross-link to the monomer during the
lithographic process, whereas unreacted mercapto functionalized
ligands are transferred to the polymer and remain
reactive after polymer formation of the surface of the
nanostructure. The depletion efficiency in dependence of the
cluster loading was investigated and full depletion of the
STED effect was observed with a cluster loading exceeding 4 wt %. A feature size by λ/11 was achieved by using a donutshaped
depletion beam. The reactivity of the mercapto groups on the surface of the nanostructure was tested by incubation
with mercapto-reactive fluorophores.

STED lithography, functional polymers, zirconium oxo cluster polymerization, thiol polymers