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L. Jonusauskas, M. Lau, P. Gruber, B. Gökce, M. Malinauskas, A. Ovsianikov:
"Plasmon assisted 3D microstructuring of gold nanoparticle-doped polymers";
Nanotechnology, 27 (2016), 1.

Abstract
3D laser lithography of a negative photopolymer (zirconium/silicon hybrid solgel SZ2080)
doped with gold nanoparticles (Au NPs) is performed with a 515 nm and 300 fs laser system and
the effect of doping is explored. By varying the laser-generated Au NP doping concentration
from 4.8 · 10−6 wt% to 9.8 · 10−3 wt% we find that the fabricated line widths are enlarged by up
to 14.8% compared to structures achieved in pure SZ2080. While implicating a positive effect on
the photosensitivity, the doping has no adverse impact on the mechanical quality of intricate 3D
microstructures produced from the doped nanocompound. Additionally, we found that SZ2080
increases the long term (∼months) colloidal stability of Au NPs in isopropanol. By discussing
the nanoparticle-light interaction in the 3D polymer structures we provide implications that our
findings might have on other fields, such as biomedicine and photonics.

Abstract
3D laser lithography of a negative photopolymer (zirconium/silicon hybrid solgel SZ2080)
doped with gold nanoparticles (Au NPs) is performed with a 515 nm and 300 fs laser system and
the effect of doping is explored. By varying the laser-generated Au NP doping concentration
from 4.8 · 10−6 wt% to 9.8 · 10−3 wt% we find that the fabricated line widths are enlarged by up
to 14.8% compared to structures achieved in pure SZ2080. While implicating a positive effect on
the photosensitivity, the doping has no adverse impact on the mechanical quality of intricate 3D
microstructures produced from the doped nanocompound. Additionally, we found that SZ2080
increases the long term (∼months) colloidal stability of Au NPs in isopropanol. By discussing
the nanoparticle-light interaction in the 3D polymer structures we provide implications that our
findings might have on other fields, such as biomedicine and photonics.

nanoparticles, laser lithography, plasmons, 3D microstructures, photonics, multiphoton processing, biomedicine

http://dx.doi.org/10.1088/0957-4484/27/15/154001