[Zurück]

V Ruiz-Díez, J. Hernando-Garcia, J. Toledo, T. Manzaneque, M. Kucera, G. Pfusterschmied, U. Schmid, J.L. Sànchez-Rojas:
"Modelling and Characterization of the Roof tile-shaped Modes of AlN-based Cantilever Resonators in Liquid Media";
Journal of Micromechanics and Microengineering, 26 (2016), S. 084008-1 - 084008-11.

In this work, roof tile-shaped modes of MEMS (micro electro-mechanical systems) cantilever
resonators with various geometries and mode orders are analysed. These modes can be
efficiently excited by a thin piezoelectric film and a properly designed top electrode. The
electrical and optical characterization of the resonators are performed in liquid media and the
device performance is evaluated in terms of quality factor, resonant frequency and motional
conductance. A quality factor as high as 165 was measured in isopropanol for a cantilever
oscillating in the seventh order roof tile-shaped mode at 2 MHz. To support the results of
the experimental characterization, a 2D finite element method simulation model is presented
and studied. An analytical model for the estimation of the motional conductance was also
developed and validated with the experimental measurements.

In this work, roof tile-shaped modes of MEMS (micro electro-mechanical systems) cantilever
resonators with various geometries and mode orders are analysed. These modes can be
efficiently excited by a thin piezoelectric film and a properly designed top electrode. The
electrical and optical characterization of the resonators are performed in liquid media and the
device performance is evaluated in terms of quality factor, resonant frequency and motional
conductance. A quality factor as high as 165 was measured in isopropanol for a cantilever
oscillating in the seventh order roof tile-shaped mode at 2 MHz. To support the results of
the experimental characterization, a 2D finite element method simulation model is presented
and studied. An analytical model for the estimation of the motional conductance was also
developed and validated with the experimental measurements.

MEMS, piezoelectric, cantilever resonator, cantilever resonator, FEM, fluid-structure interaction

http://dx.doi.org/10.1088/0960-1317/26/8/084008