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P.M. Mayrhofer, E Wistrela, M. Schneider, A. Bittner, U. Schmid:
"Precise determination of d33 and d31 from piezoelectric deflection measurements and 2D FEM simulations applied to ScxAl1-xN";
Poster: 30th Eurosensors Conference, EUROSENSORS 2016, Budapest, Hungary; 09-04-2016 - 09-07-2016; in: "Proceedings of the Eurosensors 2016", Procedia Engineering / Elsevier, 168 (2016), ISSN: 1877-7058; 876 - 879.

The reliable characterization of piezoelectric thin film properties is important for a tailored integration into micro-electromechanical systems (MEMS). In this work a method for the determination of d33 and d31 of piezoelectric thin films is presented by comparing Laser Doppler Vibrometry (LDV) displacement curves to finite element simulations (FEM) and applied to AlN and ScxAl1-xN (x = 27%). A rectangular 2-port electrode design for 2D FEM modelling enables the evaluation of d33 and d31 by a full implementation into a MatLab based fit function. This allows also to account for the substrate-support adhesive bond strength in the FEM evaluation process. Doing so, insufficient bond strength can be compensated.

The reliable characterization of piezoelectric thin film properties is important for a tailored integration into micro-electromechanical systems (MEMS). In this work a method for the determination of d33 and d31 of piezoelectric thin films is presented by comparing Laser Doppler Vibrometry (LDV) displacement curves to finite element simulations (FEM) and applied to AlN and ScxAl1-xN (x = 27%). A rectangular 2-port electrode design for 2D FEM modelling enables the evaluation of d33 and d31 by a full implementation into a MatLab based fit function. This allows also to account for the substrate-support adhesive bond strength in the FEM evaluation process. Doing so, insufficient bond strength can be compensated.

Scandium; AlN; ScxAl1-xN; Piezoelectric; d33; d31; Vibrometer; Comsol; MEMS

http://dx.doi.org/10.1016/j.proeng.2016.11.295