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G. Sordo, J. Iannacci, U. Schmid:
"Study on the Effectiveness of Different Electrode Geometries for Sputtered Aluminium Nitride-based MEMS Energy Harvesters";
Talk: Symposium Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP 2016), Budapest, Ungarn; 05-30-2016 - 06-02-2016; in: "Proc. of the "Symposium Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP 2016)"", (2016).

IoT (Internet of Things) paradigm depicts a
scenario where thousands of elements are connected in a
network accessible worldwide. To realize such ambitious
scenario different research fields have to converge. One of
the issues of such high scale network is its power demand
typically solved by means of batteries. A promising approach to
such a problem consists in harvesting energy from mechanical
vibrations present in the environment. To efficiently convert the
mechanical energy into useful electrical energy the design of
the conversion element is fundamental. The electrodes have to
be designed accordingly to the piezoelectric crystal orientation
implemented in the device. This paper analyzes the performances
of different electrode designs for Aluminum Nitride deposited
by a magnetron sputtering process and presenting a strong
c-axis orientation.

IoT (Internet of Things) paradigm depicts a
scenario where thousands of elements are connected in a
network accessible worldwide. To realize such ambitious
scenario different research fields have to converge. One of
the issues of such high scale network is its power demand
typically solved by means of batteries. A promising approach to
such a problem consists in harvesting energy from mechanical
vibrations present in the environment. To efficiently convert the
mechanical energy into useful electrical energy the design of
the conversion element is fundamental. The electrodes have to
be designed accordingly to the piezoelectric crystal orientation
implemented in the device. This paper analyzes the performances
of different electrode designs for Aluminum Nitride deposited
by a magnetron sputtering process and presenting a strong
c-axis orientation.