Talks and Poster Presentations (with Proceedings-Entry):
M. Leitgeb, Ch. Zellner, M. Schneider, U. Schmid:
"Metal assisted Chemical Etching of Monocystalline Silicon Carbide";
Poster: nanoFIS 2016 - 2nd International Conference on Functional integrated nano Systems,
Graz;
06-27-2016
- 06-29-2016; in: "nanoFIS 2016 - 2nd International Conference on Functional integrated nano Systems",
(2016).
English abstract:
Nowadays the preparation and
applications seenarios of paraus semicondutors,
such as silicon stimulate the realization of novel
MEMS or NEMS based device concepts.
Typically, they are implemented in optical
biosensors, as layers affering a high surface
area for supercapacitors or as sacrificial layer in
the fabrication of MEMS devices.
German abstract:
Nowadays the preparation and
applications seenarios of paraus semicondutors,
such as silicon stimulate the realization of novel
MEMS or NEMS based device concepts.
Typically, they are implemented in optical
biosensors, as layers affering a high surface
area for supercapacitors or as sacrificial layer in
the fabrication of MEMS devices.
Created from the Publication Database of the Vienna University of Technology.