Zeitschriftenartikel:
S. Tatra, R. Gómez Vázquez, C. Stiglbrunner, A. Otto:
"Numerical Simulation of Laser Ablation with Short and Ultra-short Pulses for Metals and Semiconductors";
Physics Procedia,
83
(2016),
S. 1339
- 1346.
Kurzfassung deutsch:
Laser ablation is widely used for micro-fabrication in electronic industry and multi-physical numerical simulations allow a better understanding of such processes and can be used to predict the ablation conditions.
The recent use of short and ultra-short pulses discloses a new scope of applications. In order to simulate the new conditions arising when using short as well as ultra-short pulses a complex model comprising the physics of laser assisted manufacturing was employed. The model has been extended by means of a two-temperature model that enables the coupling of electron- and lattice-temperature, which is considered essential to describe such short time-scale phenomena, since electrons and lattice of the workpiece are not in thermal equilibrium during the pulse. A comparison of simulation results with available experimental data is finally provided for the case of metals and semiconductors.
Kurzfassung englisch:
Laser ablation is widely used for micro-fabrication in electronic industry and multi-physical numerical simulations allow a better understanding of such processes and can be used to predict the ablation conditions.
The recent use of short and ultra-short pulses discloses a new scope of applications. In order to simulate the new conditions arising when using short as well as ultra-short pulses a complex model comprising the physics of laser assisted manufacturing was employed. The model has been extended by means of a two-temperature model that enables the coupling of electron- and lattice-temperature, which is considered essential to describe such short time-scale phenomena, since electrons and lattice of the workpiece are not in thermal equilibrium during the pulse. A comparison of simulation results with available experimental data is finally provided for the case of metals and semiconductors.
Schlagworte:
multi-physical simulations; laser ablation; volume of fluid; ultra-short pulses
"Offizielle" elektronische Version der Publikation (entsprechend ihrem Digital Object Identifier - DOI)
http://dx.doi.org/10.1016/j.phpro.2016.08.141
Erstellt aus der Publikationsdatenbank der Technischen Universität Wien.