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Zeitschriftenartikel:

S. Tatra, R. Gómez Vázquez, C. Stiglbrunner, A. Otto:
"Numerical Simulation of Laser Ablation with Short and Ultra-short Pulses for Metals and Semiconductors";
Physics Procedia, 83 (2016), S. 1339 - 1346.



Kurzfassung deutsch:
Laser ablation is widely used for micro-fabrication in electronic industry and multi-physical numerical simulations allow a better understanding of such processes and can be used to predict the ablation conditions.

The recent use of short and ultra-short pulses discloses a new scope of applications. In order to simulate the new conditions arising when using short as well as ultra-short pulses a complex model comprising the physics of laser assisted manufacturing was employed. The model has been extended by means of a two-temperature model that enables the coupling of electron- and lattice-temperature, which is considered essential to describe such short time-scale phenomena, since electrons and lattice of the workpiece are not in thermal equilibrium during the pulse. A comparison of simulation results with available experimental data is finally provided for the case of metals and semiconductors.

Kurzfassung englisch:
Laser ablation is widely used for micro-fabrication in electronic industry and multi-physical numerical simulations allow a better understanding of such processes and can be used to predict the ablation conditions.

The recent use of short and ultra-short pulses discloses a new scope of applications. In order to simulate the new conditions arising when using short as well as ultra-short pulses a complex model comprising the physics of laser assisted manufacturing was employed. The model has been extended by means of a two-temperature model that enables the coupling of electron- and lattice-temperature, which is considered essential to describe such short time-scale phenomena, since electrons and lattice of the workpiece are not in thermal equilibrium during the pulse. A comparison of simulation results with available experimental data is finally provided for the case of metals and semiconductors.

Schlagworte:
multi-physical simulations; laser ablation; volume of fluid; ultra-short pulses


"Offizielle" elektronische Version der Publikation (entsprechend ihrem Digital Object Identifier - DOI)
http://dx.doi.org/10.1016/j.phpro.2016.08.141


Erstellt aus der Publikationsdatenbank der Technischen Universitšt Wien.