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Publications in Scientific Journals:

M. F. Khan, S. Schmid, Z.J. Davis, S. Dohn, A. Boisen:
"Fabrication of resonant micro cantilevers with integrated transparent fluidic channel";
Microelectronic Engineering, 88 (2011), 8; 2300 - 2303.



"Official" electronic version of the publication (accessed through its Digital Object Identifier - DOI)
http://dx.doi.org/10.1016/j.mee.2011.02.096

Electronic version of the publication:
http://www.sciencedirect.com/science/article/pii/S0167931711002231


Created from the Publication Database of the Vienna University of Technology.