Publications in Scientific Journals:
T. Larsen, S. Keller, S. Schmid, S. Dohn, A. Boisen:
"Fabrication and Characterization of SRN/SU-8 Bimorph Cantilevers for Temperature Sensing";
Microelectronic Engineering,
88
(2011),
8;
2311
- 2313.
"Official" electronic version of the publication (accessed through its Digital Object Identifier - DOI)
http://dx.doi.org/10.1016/j.mee.2010.12.015
Electronic version of the publication:
http://www.sciencedirect.com/science/article/pii/S0167931710004934
Created from the Publication Database of the Vienna University of Technology.