[Zurück]

H. D. Wanzenböck, M. Shawrav, E. Bertagnolli, S. Schmid:
"Direct-write deposition of pure gold nanostructures - new possibilities and new challenges";
Vortrag: 61st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2017), Orlando, FL, USA; 30.05.2017 - 02.06.2017; in: "Conference Proceedings EIPBN 2017", (2017), 1 S.

In this review we report on the focused electron beam deposition of practically pure gold nanostructures by in-situ purification during the deposition and post-deposition purification of carbon-contaminated gold.
Beam-induced deposition with a focused electron beam is currently experiencing increasing attention, as it is a maskless direct-write method. With its capability to fabricate true 3-dimensional structures in the nanometer-regime FEBID stands out among other direct-write methods. Only recently [1] the direct-write synthesis of free-standing 3D nanostructures has been demonstrated by FEBID.

In this review we report on the focused electron beam deposition of practically pure gold nanostructures by in-situ purification during the deposition and post-deposition purification of carbon-contaminated gold.
Beam-induced deposition with a focused electron beam is currently experiencing increasing attention, as it is a maskless direct-write method. With its capability to fabricate true 3-dimensional structures in the nanometer-regime FEBID stands out among other direct-write methods. Only recently [1] the direct-write synthesis of free-standing 3D nanostructures has been demonstrated by FEBID.