Publications in Scientific Journals:
B. Berger, P. Szabo, R. Stadlmayr, F. Aumayr:
"Sputtering measurements using a quartz crystal microbalance as a catcher";
Nuclear Instruments & Methods in Physics Research Section B,
A quartz crystal microbalance (QCM) catcher setup for sputter yield measurements is described. In this
setup a QCM is placed next to the sputter target and acts as a catcher for sputtered material. The sputter
yield evaluation relies on assumptions about the angular distribution of sputtered particles and reflected
primary projectiles taken from simulations as well as on the knowledge of the sticking coefficient. To test
this new setup a second QCM with a Au layer was used as a sputter target. The measured ratio between
target and catcher signal is well reproduced in the simulations demonstrating the feasibility of reconstructing
the sputtering yield from the catcher signal.
Sputtering Erosion Quartz-crystal-microbalance Catcher Ion-surface interaction
Created from the Publication Database of the Vienna University of Technology.