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J. Laimer, E. Ruppert, H. Störi:
"Triode Sputter Source used for the deposition of plain bearings";
Poster: Proceedings 23rd International Symposium on Plasma Chemistry (ISPC 2017), Montreal, Canada; 31.07.2017; in: "Proceedings 23rd International Symposium on Plasma Chemistry (ISPC 2017), Montreal, Canada", (2017), S. 522 - 524.

Magnetron sputter deposition is a very powerful technique for many
applications, but this technique has also its limitations, e.g. in the deposition of inner walls
of narrow hollow cylinders made of steel, as used for plain bearings. It is demonstrated that
uniform coatings of a special bronze alloy (CuSn8) can be deposited by triode sputter
deposition in such cases with deposition rates in the order of 1 μm/min.

triode sputter deposition, plain bearing, tribology.