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D. Kohl, S. Hoser, G. Schitter:
"Budgeting of Systematic Versus Stochastic Errors in Sensor Fusion for Piezo Electric Transducers";
Talk: IFAC 2017 World Congress, Toulouse (France); 2017-07-09 - 2017-07-14; in: "Proceedings of the IFAC 2017 World Congress", (2017), 7651 - 7656.

Inherent non-linearity of piezo electric transducers, used in atomic force microscopy
limits the position accuracy. In order to improve linearity, the elongation can be estimated by
charge measurements. To extend the frequency range to DC, strain gauges are added by means of
sensor fusion. This paper addresses the challenge of choosing the filter parameters for a first order
complimentary filter used for sensor fusion. After identifying stochastic and systematic errors of
charge and strain gauge measurements, the optimal parameters of a first order complimentary
filter is computed. Depending on the application different filter parameters are found for
the same nano-positioning system, by minimizing either stochastic errors, systematic errors
or a combination of both. By this method the positioning uncertainty of charge monitoring
(234.1 nm) and strain gauge measurement (347.1 nm) is reduced to 140.6 nm for a commercial
tube piezo.

Piezo, Sensor Fusion, Error budgeting

http://dx.doi.org/10.1016/j.ifacol.2017.08.1165