[Zurück]

M. Shawrav, M.-H. Chien, P. Taus, H. D. Wanzenböck, E. Bertagnolli, S. Schmid:
"Photothermal analysis of direct-write purified gold nanostructures with nanomechanical resonator";
Vortrag: 43rd International Conference on Micro and Nanoengineering (MNE), Braga, Portugal; 18.09.2017 - 22.09.2017; in: "43rd International Conference on Micro and Nanoengineering (MNE)", (2017), 1 S.

Gold is a very appealing material for plasmonic nanosensors, nanowirebased
sensors and biomolecule immobilization due to its favorable
electric permittivity in visible-NIR regime, high electrical conductivity
and excellent chemical stability [1-3]. However, mask-less direct
patterning of gold nanostructures using traditional lithography is still
challenging. Focused electron beam induced deposition (FEBID) is an
additive direct-write nanofabrication technique, which can deposit
complex gold structures in-situ inside of an electron microscope without
any mask. However, carbon contamination of the FEBID gold structures
is the major barrier to the optimized performance of its wide application
in various fields. Recently, a novel method was introduced to deposit
highly conductive and pure FEBID gold structures [4]. This work will
present a post-deposition purification approach for gold nanostructures
which will allow their direct integration in nanoplasmomechanical
systems. The effect of FEBID purification is analyzed via the
photothermal response measured from the frequency detuning of a
nanomechanical membrane resonator [5].

Gold is a very appealing material for plasmonic nanosensors, nanowirebased
sensors and biomolecule immobilization due to its favorable
electric permittivity in visible-NIR regime, high electrical conductivity
and excellent chemical stability [1-3]. However, mask-less direct
patterning of gold nanostructures using traditional lithography is still
challenging. Focused electron beam induced deposition (FEBID) is an
additive direct-write nanofabrication technique, which can deposit
complex gold structures in-situ inside of an electron microscope without
any mask. However, carbon contamination of the FEBID gold structures
is the major barrier to the optimized performance of its wide application
in various fields. Recently, a novel method was introduced to deposit
highly conductive and pure FEBID gold structures [4]. This work will
present a post-deposition purification approach for gold nanostructures
which will allow their direct integration in nanoplasmomechanical
systems. The effect of FEBID purification is analyzed via the
photothermal response measured from the frequency detuning of a
nanomechanical membrane resonator [5].

gold, plasmonics, FEBID, nanomechanical resonator