[Back]

M. Fischeneder, M. Oposich, M. Schneider, U. Schmid:
"Tuneable Q-Factor of MEMS Cantilevers with Integrated Piezoelectric Thin Films";
Talk: Eurosensors 2017, Paris, Frankreich; 09-03-2017 - 09-06-2017; in: "Proceedings of Eurosensors 2017, Paris", MDPI, Vol. 1/ Iss. 4 (2017), ISSN: 2504-3900; 1 - 5.

When targeting the integration of atomic force microscopes (AFM) into vacuum
environments (e.g., scanning electron microscopes), a tunable Q-factor of the resonating AFM
cantilever is a key feature to enable high speed measurements with high local resolution. To achieve
this goal, an additional stimulus is applied to the cantilever with respect to the mechanical stimulus
provided by the macroscopic piezoelectric actuator. This additional stimulus is generated by an
aluminium nitride based piezoelectric actuator integrated on the cantilever, which is driven by a
phase shifted excitation. With this approach, the mechanical Q-factor measured with a laser Doppler
vibrometer (LDV) in vacuum is electrically decreased by a factor of up to 1.7.

When targeting the integration of atomic force microscopes (AFM) into vacuum
environments (e.g., scanning electron microscopes), a tunable Q-factor of the resonating AFM
cantilever is a key feature to enable high speed measurements with high local resolution. To achieve
this goal, an additional stimulus is applied to the cantilever with respect to the mechanical stimulus
provided by the macroscopic piezoelectric actuator. This additional stimulus is generated by an
aluminium nitride based piezoelectric actuator integrated on the cantilever, which is driven by a
phase shifted excitation. With this approach, the mechanical Q-factor measured with a laser Doppler
vibrometer (LDV) in vacuum is electrically decreased by a factor of up to 1.7.

http://dx.doi.org/10.3390/proceedings1040380