[Back]

G. Pfusterschmied, M. Kucera, Chr. Weinmann, M. Schneider, A. Bittner, J.L. Sànchez-Rojas, U. Schmid:
"Two-step Procedure for Multi-Mode MEMS Resonator-Based Sensing of Fluid Properties";
Talk: MEMS 2017, Las Vegas, USA; 01-22-2017 - 01-26-2017; in: "IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) 2017", IEEE, (2017), ISBN: 9781509050796; 1013 - 1016.

In this paper, a novel approach for the determination
of densities and viscosities of fluids, using a multi-mode
MEMS resonator, is introduced. A self-actuating/selfsensing
piezoelectric MEMS-resonator is design in
operated in a distinct way, so that lateral as well as
transversal bending modes can be excited within one
measurement cycle. This enables a unique evaluation
principle based on a two-step procedure. First, a special
transversal bending mode with high Q-factors in liquids
(e.g. Q = 250 in viscosity standard N1 from Paragon
Scientific) is used to determine the density. As a second
step, the lateral mode is excited to measure the viscosity,
thus achieving deviations lower than 3% compared to the
nominal values.

In this paper, a novel approach for the determination
of densities and viscosities of fluids, using a multi-mode
MEMS resonator, is introduced. A self-actuating/selfsensing
piezoelectric MEMS-resonator is design in
operated in a distinct way, so that lateral as well as
transversal bending modes can be excited within one
measurement cycle. This enables a unique evaluation
principle based on a two-step procedure. First, a special
transversal bending mode with high Q-factors in liquids
(e.g. Q = 250 in viscosity standard N1 from Paragon
Scientific) is used to determine the density. As a second
step, the lateral mode is excited to measure the viscosity,
thus achieving deviations lower than 3% compared to the
nominal values.