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Publications in Scientific Journals:

M. Fischeneder, M. Kucera, F. Hofbauer, G. Pfusterschmied, M. Schneider, U. Schmid:
"Q-factor enhancement of piezoelectric MEMS resonators in liquidswith active feedback";
Sensors and Actuators B: Chemical, 260 (2018), 198 - 203.



English abstract:
tFor a precise determination of the density and viscosity of liquids with MEMS resonators, a high Q-factor is of utmost importance. In such environments, in-plane resonant modes offer a lower dampingcompared to out-of-plane modes, thus allowing to quantify the increase in Q-factor with and withoutelectrical feedback directly. To stimulate an in-plane oscillation, a sputter deposited aluminum nitridelayer on a silicon cantilever is driven by a Lock-In amplifier which is adjusted by the feedback signaloriginating from the piezoelectric thin film. The exposure to selected liquids, ranging from ethanol toN35 with a dynamic viscosity from 1.2 mPa s up to 73.2 mPa s, features at room temperature intrinsicQ-factors of about 40 and 8, respectively. With a carefully designed amplification circuit, the Q-factorsare increased by a factor of 1.4 up to 9.3, which represents Q-factors of 374-12, demonstrating the highpotential especially at low viscous liquids.

German abstract:
tFor a precise determination of the density and viscosity of liquids with MEMS resonators, a high Q-factor is of utmost importance. In such environments, in-plane resonant modes offer a lower dampingcompared to out-of-plane modes, thus allowing to quantify the increase in Q-factor with and withoutelectrical feedback directly. To stimulate an in-plane oscillation, a sputter deposited aluminum nitridelayer on a silicon cantilever is driven by a Lock-In amplifier which is adjusted by the feedback signaloriginating from the piezoelectric thin film. The exposure to selected liquids, ranging from ethanol toN35 with a dynamic viscosity from 1.2 mPa s up to 73.2 mPa s, features at room temperature intrinsicQ-factors of about 40 and 8, respectively. With a carefully designed amplification circuit, the Q-factorsare increased by a factor of 1.4 up to 9.3, which represents Q-factors of 374-12, demonstrating the highpotential especially at low viscous liquids.


"Official" electronic version of the publication (accessed through its Digital Object Identifier - DOI)
http://dx.doi.org/10.1016/j.snb.2018.01.001


Created from the Publication Database of the Vienna University of Technology.