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Zeitschriftenartikel:

G. Schitter, P. J. Thurner, P.K. Hansma:
"Design and input-shaping control of a novel scanner for high speed atomic force microscopy";
Mechatronics, 18 (2008), S. 282 - 288.



Kurzfassung englisch:
A novel design of a scanning unit for atomic force microscopy (AFM) is presented that enables scanning speeds three orders of magnitude
faster than compared to conventional AFMs. The new scanner is designed for high mechanical resonance frequencies, based on a
new scanner design, which is optimized using finite element analysis. For high-speed scanning a new controller, based on input-shaping
techniques, has been developed that reduces imaging artifacts due to the scanner´s dynamics. The implementation of the new AFM system
offers imaging capabilities of several thousand lines per second with a scanning range of 13 lm in both scanning directions, and the
freedom to choose the fast scan-axis in any arbitrary direction in the X-Y-plane.

Schlagworte:
AFM; Fast scanning; Nano-positioning; Nanotechnology; Scanning probe; Real-time imaging; Mechanical design

Erstellt aus der Publikationsdatenbank der Technischen Universität Wien.