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G. Schitter, K. Åström, B. DeMartini, P. J. Thurner, K. Turner, P.K. Hansma:
"Design and modeling of a high-speed AFM-scanner";
IEEE Transactions on Control Systems Technology, 15 (2007), 5; 906 - 915.

new mechanical scanner design for a high-speed
atomic force microscope (AFM) is presented and discussed in
terms of modeling and control. The positioning range of this
scanner is 13 m in the X- and Y-directions and 4.3 m in the
vertical direction. The lowest resonance frequency of this scanner
is above 22 kHz. This paper is focused on the vertical direction
of the scanner, being the crucial axis of motion with the highest
precision and bandwidth requirements for gentle imaging with
the AFM. A second- and a fourth-order mathematical model of
the scanner are derived that allow new insights into important
design parameters. Proportional-integral (PI)-feedback control
of the high-speed scanner is discussed and the performance of the
new AFM is demonstrated by imaging a calibration grating and a
biological sample at 8 frames/s.

Atomic force microscopy, fast scanning, mechatronics, nanotechnology, precision positioning, real time imaging.