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Publications in Scientific Journals:

G. Schitter, A. Stemmer:
"Identification and open-loop tracking control of a piezoelectric tube scanner for high-speed scanning probe microscopy";
IEEE Transactions on Control Systems Technology, 12 (2004), 3; 449 - 454.



English abstract:
Fast and precise positioning is a basic requirement
for nanotechnology applications. Many scanning-probe microscopes
(SPM) use a piezoelectric tube scanner for actuation with
nanometer resolution in all three spatial directions. Due to the
dynamics of the actuator, the imaging speed of the SPM is limited.
By applying model-based open-loop control, the dynamic behavior
of the scanner can be compensated, reducing the displacement
error, topographical artifacts, modulation of the interaction force,
and modulation of the relative tip-sample velocity. The open-loop
controlled system enables imaging of up to 125-µm-sized samples
at a line scan rate of 122 Hz, which is about 15 times faster than
the commercial system.

Keywords:
Atomic force microscopy, fast scanning, friction force, piezoelectric transducers, scanning probe, tracking control.

Created from the Publication Database of the Vienna University of Technology.