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G. Schitter, A. Stemmer:
"Model-based signal conditioning for high-speed atomic force and friction force microscopy";
Microelectronic Engineering, 67-68 (2003), 938 - 944.

The imaging speed of atomic force microscopy (AFM) is limited due to the dynamics of the piezo scanner
along the scanning direction. This article presents the identification and open-loop control of a piezoelectric tube
scanner to enable fast imaging. By applying a model based open-loop control the dynamic behaviour of the
piezo tube can be compensated. The lateral displacement error is reduced and topographical artifacts, additional
cantilever deflection, modulation of the tip-sample interaction force, and modulation of the relative tip-sample
velocity vanish. The open-loop controlled AFM scanner enables imaging at a line scan rate of 122 Hz, which is
about 15 times faster than standard systems.

Friction force; Fast scanning; Tracking control; Scanning probe