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G. Schitter, A. Stemmer:
"Eliminating mechanical perturbations in scanning probe microscopy";
Nanotechnology, 13 (2002), 663 - 665.

This paper presents a method for cancelling mechanical vibrations in
scanning probe microscopes by recording the vibrations with an auxiliary
distance sensor and subsequently removing them from the topography
signal. For the experimental verification, the auxiliary sensor was mounted
in a commercial atomic force microscope (AFM) side by side with the probe
tip. Combination of the signals from the AFM and distance sensor converts
the microscope into a differential instrument, allowing for subtraction of the
vibration-induced noise up to the control bandwidth of the AFM system.
Imaging with sub-nanometre resolution in a noisy environment was
demonstrated.