[Back]

J. R. van Hulzen, G. Schitter, J. van Eijk, P. M. J. Van den Hof:
"Modal actuation for high-bandwidth nano-positioning";
Talk: 2010 American Control Conference, Baltimore (USA); 06-30-2010 - 07-02-2010; in: "2010 American Control Conference", (2010), 6525 - 6530.

In high speed AFMs the vertical axis of the
sample positioning stage requires high bandwidth feedback
control. In these systems the dynamics of the piezoelectric
actuator, its support structure and load play a dominant role
in the design of the feedback loop. System performance can be
increased by avoiding the excitation of resonant modes of the
piezoelectric actuator by modal actuation. In this approach,
the piezoelectric actuator is modified to render modes close
to the controller bandwidth uncontrollable. Due to its static
hardware implementation robustness issues may emerge due to
varying loads used for AFM imaging. This paper focusses on
performance robustness of modal filters due to load variation.