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S. Kuiper, G. Schitter:
"MIMO self sensing control of a piezoelectric tube scanner";
Talk: ASME 2009 Dynamic Systems and Control Conference, Hollywood (USA); 10-12-2009 - 10-14-2009; in: "Proceedings of the ASME 2009 Dynamic Systems and Control Conference", (2009), 1 - 7.

Piezoelectric tube scanners are commonly used in Scanning
Probe Microscopy (SPM) to provide the scanning motion of the
tip or sample. Oscillations due to the weakly damped resonances
of the scanner are a major source of image distortion in SPMimaging.
In this contribution, multiple input-multiple output
(MIMO) self-sensing actuation of a piezoelectric tube scanner is
presented, allowing to actively dampen the scanner oscillations.
By connecting the tube scanner in a capacitive bridge-circuit,
the piezoelectric tube is simultaneously used as a sensor and
actuator. In order to enable the use of low-order decentralized
controllers, the cross-talk between both axes is reduced by compensating
for the capacitive coupling. The MIMO self-sensing
actuation allows to actively dampen the scanner´s fundamental
resonance by 18dB, while simultaneously reducing the resonance
induced coupling by 30dB. Experimental results verify a significant
reduction of the scanner oscillations in both positioning
axes during fast scanning.