Contributions to Books:
X. Klemenschits, S. Selberherr, L. Filipovic:
"Unified Feature Scale Model for Etching in SF6 and Cl Plasma Chemistries";
in: "Proceedings of the 2018 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS)",
F. Gamiz, V. Sverdlov, C. Sampedro, L. Donetti (ed.);
IEEE,
2018,
ISBN: 978-1-5386-4812-4,
177
- 180.
"Official" electronic version of the publication (accessed through its Digital Object Identifier - DOI)
http://dx.doi.org/10.1109/ULIS.2018.8354763
Electronic version of the publication:
http://www.iue.tuwien.ac.at/pdf/ib_2018/CP2018_Klemenschits_1.pdf
Created from the Publication Database of the Vienna University of Technology.