E. Csencsics, S. Ito, J. Schlarp, G. Schitter:
"System Integration and Control for 3D Scanning Laser Metrology";
IEEJ Journal of Industry Applications (eingeladen), 8 (2019), 2; 11 S.

Kurzfassung englisch:
Mechatronic imaging systems, ranging from nanoscale metrology to telescope systems and adaptive optics for as-
tronomy, are complex machines that demand continual improvement of system speed, range, and precision. This
demand requires advanced designs of the mechatronic components and a motion control scheme that carefully con-
siders the interplay of a physical plant and the target application. A proper data acquisition system is required to
synchronously acquire and process measurement and position data, and a sophisticated system integration is needed
to obtain the maximum performance of the resulting system. This paper discusses the interplay between process and
control design, as well as the system integration with the example of a scanning laser triangulation system for high
precision 3D metrology. The integration process can be tailored to individual applications, and is discussed for raster
and Lissajous scan trajectories, considering their individual requirements for the system and control design. Further it
is demonstrated how these individually tailored system components can improve the performance in terms of precision
and efficiency by several orders of magnitude.

Mechatronic imaging systems, system integration, scanning laser metrology, model based control, iterative learning control

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