Publications in Scientific Journals:
E. Csencsics, J. Schlarp, G. Schitter:
"High Performance Hybrid-Reluctance-Force-based Tip/tilt System: Design, Control and Evaluation";
IEEE/ASME Transactions on Mechatronics,
23
(2018),
5;
2494
- 2502.
English abstract:
This paper presents the design, assembly and evaluation of a novel integrated two degree of freedom (2DoF) actuator
design for tip/tilt motion and its integration into a fast steering
mirror with comparably large range. The system is designed for
scanning applications, such as in optical metrology systems, and
comprises an integrated symmetric 2DoF hybrid-reluctance-force
actuator and mover-flexure-design. The actuator design employs
a permanent magnet for biasing the actuator with a constant
flux and two actuator coils per axis to generate a steering flux
for positioning the mover. The system prototype has an angular
range of ±3◦ in tip and tilt and achieves a closed-loop control
bandwidth of 1 kHz based on the signal of eddy current sensors.
Compared to the only so far realized state-of-the-art reluctance
force actuated FSM system with integrated sensors, the presented
design enables to improve the product of range times bandwidth,
representing a measure for the system performance, by more than
85%.
Keywords:
Reluctance actuator, Flux steering, Tip/tilt sys- tem, Flexure design, Fast steering mirror
"Official" electronic version of the publication (accessed through its Digital Object Identifier - DOI)
http://dx.doi.org/10.1109/TMECH.2018.2866272
Electronic version of the publication:
https://publik.tuwien.ac.at/files/publik_272938.pdf
Created from the Publication Database of the Vienna University of Technology.