A. Hajian, M. Stöger-Pollach, M. Schneider, F. Crunwell, U. Schmid:
"Porosification behaviour of LTCC substrates with potassium hydroxide";
Journal of the European Ceramic Society,
The demand to meet advanced substrate requirements in terms of electrical, mechanical, thermal, and dielectric
properties has led to an increasing interest in low temperature co-fired ceramics (LTCC). However, LTCC materials
suffer from high permittivity. We recently showed that the wet-chemical porosification under acidic
conditions allows the reduction of the permittivity of LTCCs in the as-fired state. In the present study, potassium
hydroxide solution was employed as an alternative etchant which features a suitable bearing plane for further
metallization lines. Various characterization techniques, including scanning and transmission electron microscopy,
energy-dispersive X-ray spectroscopy, X-ray diffraction analysis, and electron energy loss spectroscopy
were used for investigation of the morphology and chemical composition of the substrates. Three-dimensional
information of the surface topography was acquired by means of MeX® Alicona software and the obtained
roughness parameters confirmed the advantage of the proposed approach over acid treatment when targeting an
enhanced surface quality.
"Offizielle" elektronische Version der Publikation (entsprechend ihrem Digital Object Identifier - DOI)
Erstellt aus der Publikationsdatenbank der Technischen Universität Wien.