A. Hajian, M. Stöger-Pollach, M. Schneider, F. Crunwell, U. Schmid:
"Porosification behaviour of LTCC substrates with potassium hydroxide";
Journal of the European Ceramic Society, 38 (2018), S. 2369 - 2377.

Kurzfassung englisch:
The demand to meet advanced substrate requirements in terms of electrical, mechanical, thermal, and dielectric
properties has led to an increasing interest in low temperature co-fired ceramics (LTCC). However, LTCC materials
suffer from high permittivity. We recently showed that the wet-chemical porosification under acidic
conditions allows the reduction of the permittivity of LTCCs in the as-fired state. In the present study, potassium
hydroxide solution was employed as an alternative etchant which features a suitable bearing plane for further
metallization lines. Various characterization techniques, including scanning and transmission electron microscopy,
energy-dispersive X-ray spectroscopy, X-ray diffraction analysis, and electron energy loss spectroscopy
were used for investigation of the morphology and chemical composition of the substrates. Three-dimensional
information of the surface topography was acquired by means of MeX® Alicona software and the obtained
roughness parameters confirmed the advantage of the proposed approach over acid treatment when targeting an
enhanced surface quality.

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