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P Schmid, C Zarfl, F. Triendl, F. Maier, S. Schwarz, M. Schneider, U. Schmid:
"Impact of adhesion promoters and sputter parameters on theelectro-mechanical properties of Pt thin films at high temperatures";
Sensors and Actuators A: Physical, 285 (2018), 149 - 157.

tIn this study the influence of film thickness, adhesion promoters such as chromium (Cr) and rutile tita-nium dioxide (TiO2), sputtering power and substrate temperature on the electro-mechanical propertiesof platinum (Pt) thin films is investigated. The bilayered samples consisting of an adhesion promoterand a Pt thin film are deposited using direct current magnetron sputtering on sapphire substrates undcharacterized by Van-der-Pauw as well as gauge factor measurements up to 500◦C in air. Additionally,transmission electron microscopy and energy dispersive X-ray spectroscopy analysis are performed toinvestigate the microstructure and the chemical composition of the thin films before and after temper-ature loading. No substantial impact of the Pt film thickness on the electro-mechanical properties isdetermined. The diffusion of Cr into the Pt thin film at elevated temperatures leads to a lower gaugefactor with a higher scatter range. Furthermore, higher sputtering power and substrate heating duringdeposition lead to a higher crystallinity of the Pt thin film and thus promote higher gauge factors.

http://dx.doi.org/10.1016/j.sna.2018.11.010