Publications in Scientific Journals:
X. Klemenschits, S. Selberherr, L. Filipovic:
"Modeling of Gate Stack Patterning for Advanced Technology Nodes: A Review";
Micromachines (invited),
9
(2018),
12;
631-1
- 631-31.
"Official" electronic version of the publication (accessed through its Digital Object Identifier - DOI)
http://dx.doi.org/10.3390/mi9120631
Electronic version of the publication:
http://www.iue.tuwien.ac.at/pdf/ib_2018/JB2018_Klemenschits-3.pdf
Created from the Publication Database of the Vienna University of Technology.