Vorträge und Posterpräsentationen (mit Tagungsband-Eintrag):
N. Cazier, P. Sadeghi, M. Shawrav, A. Steiger-Thirsfeld, S. Schmid:
"Gap plasmon resonance in electromagnetically-actuated nanomechanical silicon nitride strings";
Poster: Microelectronic Systems Symposium (MESS18),
Wien;
12.04.2018
- 13.04.2018; in: "MESS 18 Microelectronic Systems Symposium",
OVE,
Band 91
(2018),
978-3-903249-01-0;
1 S.
Kurzfassung englisch:
We present a new kind of electromagneticallyactuated
nanoplasmomechanical string resonator. This
nanomechanical resonator is made of two gold covered silicon
nitride (SiN) strings separated by a 100 nm wide gap. These
strings were cut into a SiN membrane with FIB milling, as
shown in the SEM image of the resonator on Figure 1.
Erstellt aus der Publikationsdatenbank der Technischen Universität Wien.