Vorträge und Posterpräsentationen (mit Tagungsband-Eintrag):
H. D. Wanzenböck, M. Reichenpfader, M. Gavagnin, M. Shawrav, E. Bertagnolli:
"The scanning electron microscope as nanofactory -Direct-write deposition of nanomagnets";
Vortrag: 19th International Microscopy Congress IMC19,
Sydney;
09.09.2018
- 14.09.2018; in: "IMC19",
(2018),
2 S.
Kurzfassung englisch:
Scanning electron microscopes are known as instruments for high-resolution imaging and for chemical and crystallographic analysis. However, the energy of the electron beam can also be used for nanofabrication with a direct-write approach. In this case the focused electron beam is used to initiate a reaction on the scanned sample surface, that leads to deposition, removal or modification of material of the sample. The most prominent process is an additive direct write process called focused electron beam induced deposition (FEBID).
Erstellt aus der Publikationsdatenbank der Technischen Universität Wien.