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M. Piller, M.-H. Chien, N. Luhmann, S. Schmid:
"Nanomechanical IR detector";
Vortrag: 5th International IR WORKshop, Olching (eingeladen); 12.11.2018 - 13.11.2018; in: "IR WORKshop 2018 Proceedings", (2018), 1 S.

We present a novel approach for a sensor to detect broadband IR radiation at room temperature with a
responsivity of currently 16 kW-1 and a noise equivalent power (NEP) of 22 pW/Hz1/2. The detector is based
on a nanoelectromechanical systems (NEMS) comprising a temperature sensitive nanomechanical silicon
nitride drum. The 50 nm thick silicon nitride drum features a center absorber pad made of titanium nitride.
Photons that thermalize on the absorber pad heat the membrane, which causes a detuning of its resonance
frequency. The sensitivity can be further improved by active stress-tuning of the silicon nitride drum. Assuming
a mechanical drum stress of 1 MPa, the responsivity increases to ~360 kW-1, which would result in an estimated
ultimate NEP of 38 fW/Hz1/2 at room temperature.