Vorträge und Posterpräsentationen (mit Tagungsband-Eintrag):
M. Kahr, H. Steiner, W. Hortschitz, M Stifter, A. Kainz, F. Keplinger:
"3D-Printed MEMS Magnetometer Featuring Compliant Mechanism";
Vortrag: Eurosensors 2018,
Graz, Österreich;
09.09.2018
- 12.09.2018; in: "Proceedings - Eurosensors 2018, Graz",
MDPI,
Vol. 2
(2018),
ISSN: 2504-3900;
S. 1
- 4.
Kurzfassung englisch:
This paper reports a novel 3D-printed MEMS resonant magnetometer with optical readout which features a mechanical conversion of a vertical oscillation into a horizontal one. This demonstrates the advantages of 3D-printing technology in terms of rapid prototyping, low costs and fast product development cycles. In addition, 3D-printing enables `true´ three-dimensional MEMS structures in contrast to the traditional MEMS technology which allows only two dimensional structures. The measurement approach comprises a hybrid implementation of an optical modulator, an LED and a photodetector
Schlagworte:
3D-printing; magnetometer; optical readout; lorentz force; complient mechanism
"Offizielle" elektronische Version der Publikation (entsprechend ihrem Digital Object Identifier - DOI)
http://dx.doi.org/10.3390/proceedings2130784
Erstellt aus der Publikationsdatenbank der Technischen Universität Wien.