Vorträge und Posterpräsentationen (mit Tagungsband-Eintrag):
M. Kahr, M Stifter, H. Steiner, W. Hortschitz, G. Kovacs, A. Kainz, J. Schalko, F. Keplinger:
"Responsitivity Measurement of a Lorentz Force Transducer for Homogeneous and Inhomogeneous Magnetic Fields";
Vortrag: Eurosensors 2018,
Graz, Österreich;
09.09.2018
- 12.09.2018; in: "Proceedings - Eurosensors 2018, Graz",
MDPI,
Vol. 2
(2018),
ISSN: 2504-3900;
S. 1
- 5.
Kurzfassung englisch:
This paper reports a MEMS gradiometer consisting of two independent, laterally
oscillating masses on a single chip with integrated optical readout featuring a responsitivity of
35V/T at resonant operation. The symmetrical design of the two masses offers high accuracy and
low cost by using conventional MEMS batch fabrication technology. The sensing principle is based
on lateral displacement of the masses actuated by Lorentz forces which modulates a light flux
passing through a stationary mask and the moving mask integrated in the masses. Phase and
intensity detected by photodiodes reveal information about the uniformity of an external applied
magnetic field, hence, enables the measurement of gradient-, homogeneous- and offset gradient
magnetic fields.
Schlagworte:
MOEMS; gradiometer; Lorentz force
"Offizielle" elektronische Version der Publikation (entsprechend ihrem Digital Object Identifier - DOI)
http://dx.doi.org/10.3390/proceedings2130843
Erstellt aus der Publikationsdatenbank der Technischen Universität Wien.