Vorträge und Posterpräsentationen (mit Tagungsband-Eintrag):
A. Kainz, W. Hortschitz, H. Steiner, M Stifter, F. Keplinger:
"Equivalent Circuit Model of an Optomechanical MEMS Electric Field Strength Sensor";
Vortrag: Eurosensors 2018,
Graz, Österreich;
09.09.2018
- 12.09.2018; in: "Proceedings - Eurosensors 2018, Graz",
MDPI,
Vol. 2
(2018),
ISSN: 2504-3900;
S. 1
- 4.
Kurzfassung englisch:
We present a simple equivalent circuit model for the transfer function of an optomechanical
MEMS transducer capable of distortion-free electric field strength measurements. This model allows
not only to qualitatively understand the characteristics of the transducer but also takes into account
parasitic effects and material properties. Such parasitic effects have been observed while evaluating
the first results of electric field measurements performed with the sensor. The model helped to
identify and diminish these parasitic effects.
Schlagworte:
MEMS; sensors; electric field sensor; electric field; modelling; equivalent circuit models
"Offizielle" elektronische Version der Publikation (entsprechend ihrem Digital Object Identifier - DOI)
http://dx.doi.org/10.3390/proceedings2130712
Erstellt aus der Publikationsdatenbank der Technischen Universität Wien.