Talks and Poster Presentations (with Proceedings-Entry):
A. Kainz, W. Hortschitz, H. Steiner, M Stifter, F. Keplinger:
"Equivalent Circuit Model of an Optomechanical MEMS Electric Field Strength Sensor";
Talk: Eurosensors 2018,
Graz, Österreich;
2018-09-09
- 2018-09-12; in: "Proceedings - Eurosensors 2018, Graz",
MDPI,
Vol. 2
(2018),
ISSN: 2504-3900;
1
- 4.
English abstract:
We present a simple equivalent circuit model for the transfer function of an optomechanical
MEMS transducer capable of distortion-free electric field strength measurements. This model allows
not only to qualitatively understand the characteristics of the transducer but also takes into account
parasitic effects and material properties. Such parasitic effects have been observed while evaluating
the first results of electric field measurements performed with the sensor. The model helped to
identify and diminish these parasitic effects.
Keywords:
MEMS; sensors; electric field sensor; electric field; modelling; equivalent circuit models
"Official" electronic version of the publication (accessed through its Digital Object Identifier - DOI)
http://dx.doi.org/10.3390/proceedings2130712
Created from the Publication Database of the Vienna University of Technology.