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G. Hammer, A. Kainz, W. Hortschitz, H.-W. Zan, H.-F. Meng, T. Sauter, F. Keplinger:
"Detection of Heart and Respiration Rate with an Organic-Semiconductor-Based Optomechanical MEMS Sensor";
Vortrag: Eurosensors 2018, Graz, Österreich; 09.09.2018 - 12.09.2018; in: "Proceedings - Eurosensors 2018, Graz", MDPI, Vol. 2 (2018), ISSN: 2504-3900; S. 1 - 5.

We present a displacement-sensitive sensor comprising a microelectromechanical (MEMS)
chip and organic optoelectronic components capable of measuring the heart and respiration rate on
humans. The MEMS sensor relies on the inertial deflection of a small silicon oscillator. The readout
of the deflection is optical and works via modulation of the light flux passing through the MEMS.
Organic optoelectronics are used as light source and detector, since these offer a homogeneous light
distribution and a more compact package in a future integration. Two types of MEMS, differing
in their resonance frequency, were designed and characterised in combination with both organic
and inorganic optoelectronics prior to measuring heart and respiration rate. Subsequently, by
measurements on the neck, pulse and respiration rate were successfully measured.

MEMS; biosensors; organic semiconductors; heart rate; respiration rate

http://dx.doi.org/10.3390/proceedings2130715