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H. Steiner, A. Kainz, M Stifter, M. Kahr, G. Kovacs, F. Keplinger, W. Hortschitz:
"Cross-Sensitivity of an Optomechanical MEMS Transducer";
Vortrag: Eurosensors 2018, Graz, Österreich; 09.09.2018 - 12.09.2018; in: "Proceedings - Eurosensors 2018, Graz", MDPI, Vol. 2 (2018), ISSN: 2504-3900; S. 1 - 5.

This work presents the investigation on a MEMS based optomechanical transducer for
displacements or vibration regarding its cross-sensitivities to multidirectional input excitations. The
principle of the optomechanical transducer is based on the modulation of the light flux passing
through one static and one movable micromechanical aperture. This kind of transducer is of
increasing interest for MEMS sensors since it has inherent benefits and can compete with state-ofthe-
art readout concepts regarding its resolution. We have experimentally proven that the
sensitivities of the device is 3.3 × 107 V/m in x-direction, 8.23 × 106 V/m in y-direction, while it is
negligible in z-direction.

This work presents the investigation on a MEMS based optomechanical transducer for

http://dx.doi.org/10.3390/proceedings2130719