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C. Herzig, J. Frank, M. Morgenbesser, A.K. Opitz, J. Fleig, A. Limbeck:
"Recent Improvements In The Analysis Of Complex Metal Oxide Thin Films Using Online Laser Ablation Of Solids In Liquids";
Vortrag: 14th European Workshop on Laser Ablation, Pau, France; 26.06.2018 - 29.06.2018; in: "Book of Abstracts", (2018), S. 53.

Laser ablation (LA) is a powerful and established tool for the analysis of solid samples using inductively coupled plasma-mass spectrometry (ICP-MS). This technique o ers the possibility to obtain depth pro les or lateral distribution maps with a resolution in the low µm range. One major drawback is the di cult/complex quanti cation of the derived signals. Due to matrix e ects in the ablation step as well as in the ionization step, matrix matched standards are obligatory for quantifying data obtained by LA-ICP-MS. For novel materials, such as complex metal oxides (COM), matrix matched standards are not available. Therefore in-house produced standards are necessary.
Recently we presented an approach to circumvent this drawback of LA-ICP-MS: The He carrier gas flow is replaced by a liquid (e.g. H2O) to transport the particles produced in the ablation step into the detection system. The big advantage of this approach called online LASIL (Laser Ablation of Solids in Liquid) is the possibility to use liquid standard solutions for calibration, because the nanoparticle suspensions yielded with this technique can be treated as liquid solutions. With this procedure the advantages of the conventional liquid measurement and solid sampling approaches can be combined. First results of coupling the LASIL technique with ICP-OES have been published by Bonta et al. [1].
In this contribution we present further improvements of the online LASIL system gaining a deeper understanding of the system's behavior. For example the use of a discontinuous ow of the liquid transport medium changed the washout behavior of the in house built LASIL cell dramatically: The signal intensity and reproducibility increased. Due to these progresses, determining the stoichiometry of CMOs with minor dopant concentrations is pos- sible. Additionally the calibration approach could be further simpli ed.

LASIL, complex metal oxides, stoichiometry