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J. Hafner, M. Teuschel, J. Schrattenholzer, M. Schneider, U. Schmid:
"Optimized Batch Process for Organic MEMS Devices";
Talk: Eurosensors 2018, Graz, Österreich; 09-09-2018 - 09-12-2018; in: "Proceedings - Eurosensors 2018, Graz", MDPI, (2018), ISSN: 2504-3900; 1 - 4.

Recently, organic electromechanical transducers have attracted intense scientific and
technological interest due to their unique mechanical flexibility and their piezoelectric properties.
However, the fabrication of organic MEMS devices is challenging. For example, a lift-off process
cannot be used on polymers, because of the solvent in photoresists. Here, we present a
straightforward and low-cost batch process for organic MEMS devices using standard
micromachining techniques. As organic material we used the ferroelectric (co-)polymer
poly(vinylidene fluoride-trifluorethylene) (P(VDF-TrFE)). The integration of the polymer in a
CMOS-compatible process was optimized in terms of deposition and patterning of the polymer and
the corresponding metal layers. Micromachined devices, such as capacitors and cantilevers, were
fabricated and analysed. The ferroelectric perfomance was evaluated by electrical and
electromechanical measurements. Our first results indicate that the proposed fabrication process is
reliable resulting in well-functioning organic MEMS devices. We measured as piezoelectric constant
a d 33 of −32 pm/V with our organic P(VDF-TrFE) capacitors.

http://dx.doi.org/10.3390/proceedings2130904