Vorträge und Posterpräsentationen (mit Tagungsband-Eintrag):
F. Patocka, M. Schlögl, M. Schneider, U. Schmid:
"Novel MEMS Sensor for Detecting Magnetic Particles in Liquids";
Vortrag: Eurosensors 2018,
Graz, Österreich;
09.09.2018
- 12.09.2018; in: "Proceedings - Eurosensors 2018, Graz",
MDPI,
(2018),
ISSN: 2504-3900;
S. 1
- 4.
Kurzfassung englisch:
We present a novel MEMS sensor for the detection of magnetic particles in liquids, which
consists of a microcantilever excited piezoelectrically in resonance and having an integrated planar
coil on its free end. Due to the latter component, magnetic particles are attracted and accumulate on
the sensor surface. The additional mass introduced by the particles changes the resonance frequency
of the microcantilever serving as measured quantity. To evaluate our design, we dispersed 250 nm
iron-oxide particles in de-ionized water and monitored the resonance frequency during particle
accumulation. 100 min after measurement start, a total resonance frequency shift of 6 kHz was
found, which can easily be measured and shows the high potential of the proposed sensor design.
Schlagworte:
MEMS sensor; microcantilever; magnetic particles; resonant mass sensing
"Offizielle" elektronische Version der Publikation (entsprechend ihrem Digital Object Identifier - DOI)
http://dx.doi.org/10.3390/proceedings2130868
Erstellt aus der Publikationsdatenbank der Technischen Universität Wien.